4 Nov 2014

MEMS-Mechanical Sensors and Actuators UNIT-2 Material

wallofsuspects 00:10 0

Objectives:

objective of this chapter is to study the following.

To elucidate the role of microsensors and microactuator with examples

To discuss the principle of sensing and actuation

To list out the types of measurands to be measured

Principle of various types of mechanical microsensors and microactuators

Cantilever, beam and diaphragm type microstructures as active element

Principle of operation of tlow sensor and pressure sensor

Capacitive effects in sensing and actuating

Application of MEMS microphones for acoustics measurements

MEMS gyroscope as rate sensor

Principle of shear mode piezoactuator

Typical gripping piezoactuator

Inchworm Technology and actuation principle

Sensors and actuators play a significant role in almost all kinds of instrumentation, process control,

factory automation and machine control applications. For simple understanding consider the machine

control applications such as the mechatronic systems. A mechatronic system is an electronically

controlled mechanical machine. Some examples of mechatronic systems are robot, AGV (Autonomous

Guided Vehicle), cranes, NC (Numerically Controlled) machines, automobile engine and tanker.

Micromechatronic systems are mechatronic systems but their dimensions are measured in microscale

levels. Regardless of their dimension all mechatronic systems are composed of four prime components.

They are sensors, actuators, controllers and mechanical components. Figure 5.l(a) shows a schematic

diagram of such systems comprising all the components stated above. The schematic illustration is

common to all types of mechatronic systemsl. Figure 5.1(b) shows an example of motion control

I For more information on mechatronic system refer to Chapter l ofthe Book Mechatrrmiu' Principles. Concepts and

Applications. by l\/lahalik published by McGraw-Hill. Singapore.

Download Unit-2 Material Here - - Click Here

Categories