MEMS- Chemical and Biomedical Microsystems UNIT-8 Material

MEMS- Chemical and Biomedical Microsystems UNIT-8 Material

MEMS- Chemical and Biomedical Microsystems UNIT-8 Material

Objectives :

• objective of this chapter is to study the following.
• DNA (Deoxyribonucleine~Acid) sensor
• Surface Acoustic Wave (SAW) sensors
• Biomedical and chemical microdevices
• BioMEMS and Chemodevices
• Chemo resistor, cheinocapacitor and chemotransistor

The scope of MEMS technology has recently been extended to health sciences and chemical industry.

MEMS devices used for health science and chemical industry are called BioMEMS and chemical

microsystems. Both BioMEMS and chemical microsystems are commonly called biochemical

microsysrems (BCMS). In other words, BCMS is defined as the methods and principles that allow the

development of biochemical sensitive microdevices. Areas of study and development include diagnostic tools, genomics, drug discovery and drug delivery systems. Some important designs are chemosensors, pollution and odor detectors (e~nose) and DNA (Deoxyribonucleic Acid) analyzers 

(An introduction to DNA is given in Appendix C). BCMS can _be classified under two topics; BCMS actuators and equipments (BCMSAE) and BCMS sensory devices (BCMSSD). BCMSAE deals with the study of surgical equipments, instruments and micro artificial organs. On the other hand, BCMSSD includes fundamental study of sensory devices based on various transduction principles. This chapter deals with BCMSSD. The development of BCMSAE is still in the rudimentary stage of research. 

However. basic operational principles of some of these systems have already been presented in the previous chapters (In

Chapter 8-Magnetic actuator for microsurgery applications and in Chapter ).

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